Environmental Detect and Control SPM
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Temperature and humidity Sensors are embedded in CSPM5500 system,
monitor by LED.
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Temperature
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Humidity
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Range
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-55～150℃
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0～100％RH
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Resolution
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0.01℃
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0.03％RH
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Accuracy
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0.1℃
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0.5％RH
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Response time
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5000ms
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4000ms
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Non-linearity
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±0.18℃
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＜1％RH
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Long-time stability
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±0.08℃
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＜1％RH
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Seal-air System can be employed to CSPM5500 for Environmental Control SPM.
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Quartz glass window
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Specifications:
* alloy seal cab for disturbance isolation
* acrylonitrile-butadiene O-ring for better seal
* Large Quartz glass window for sample board-band ray radiation
* Adjustable lightening device inside for processing monitor
* Air inlet-outlet port for environmental control
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Environmental Control SPM
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Sample-heating-stage System can be employed to CSPM5500 for sample temperature Control.
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Diameter
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30mm
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Power
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6W (Max.)
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Temperature
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150℃ (Max.)
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Accuracy
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0.5℃
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Sample-heating-stage System
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